大型仪器共享管理系统

高分辨冷场发射扫描电镜主机（包括真空系统、电子光学系统、检测器系统），检测器包括Upper和Lower两个二次电子探测器，背散射电子检测器。另外，配备CL检测器（GATAN，Monarc Pro）、无窗能谱仪（牛津，Ultim Max100）。
一、SE分辨率：0.6nm@15Kv（工作距离4mm）；0.7nm@1Kv（工作距离1.5mm，减速模式）
二、BSE分辨率：3nm@15Kv（工作距离8mm）
三、能谱仪能量分辨率：Mn分辨率优于127eV；F分辨率优于64Kv；C分辨率优于56eV。
四、CL光谱分辨率：优于0.2nm（12001p/mm光栅，P标准样品）。最高取谱速度：6000s/s。光谱探测范围PMT：185-980nm。光谱探测范围CCD：200nm-1100nm。分光光路狭缝可调范围：0.01mm-10mm。

The high-resolution cold-field emission scanning electron microscope host (including vacuum system, electron-optical system, detector system), the detector includes two secondary electron detectors, Upper and Lower, and a backscattered electron detector. In addition, it is equipped with a CL detector (GATAN, Monarc Pro), a windowless spectrometer (Oxford, Ultim Max100).
1. SE resolution: 0.6nm@15Kv (working distance 4mm); 0.7nm@1Kv (working distance 1.5mm, deceleration mode)
2. BSE resolution: 3nm@15Kv (working distance 8mm)
3. energy resolution of energy spectrometer: Mn resolution better than 127eV; F resolution is better than 64Kv; C resolution is better than 56eV.
4. CL spectral resolution: better than 0.2 nm (12001p/mm grating, P standard sample). Maximum score acquisition speed: 6000s/s. Spectral detection range PMT: 185-980nm. Spectral detection range CCD: 200nm-1100nm. Adjustable range of splitting optical path slit: 0.01mm-10mm.

1、二次电子形貌、背散射电子形貌；
2、阴极荧光成像；
3、能谱分析。
可对样品进行表面形貌观察、在亚微米及纳米空间分辨率下获得与物质的成分、杂质、结构、缺陷等相关的丰富研究信息。

(1) Secondary electron topography and backscattered electron topography； (2) Cathode fluorescence imaging ；
(3) Energy spectrum analysis
The surface topography of the sample can be observed, and a wealth of research information related to the composition, impurities, structure, and defects of the substance can be obtained at sub-micron and nanometer spatial resolution.

主要规格及技术指标

主要功能及特色

主要附件及配置