"1)系统构成:手动探针台主机、图像显微装置、探针座、探针、连接线等
2) 样品载片台:载片台尺寸:6英寸;X/Y轴行程:≥150*150mm;三轴,可分区吸附样品,并具备各分区独立真空控制开关;载片台可被水平拉出移动:≥90mm,便于放置和取出被测样品
3)具有两个带真空吸附能力的子承片台Chuck,支持今后扩展研发射频项目的功能:用于射频校准与接触调整;
4)具有高稳定度显微镜桥架,XY最大可移动50mm*50mm
5) 显微镜最大放大倍数:可达400倍;配有2X、10X、20X共三个物镜
6)配置高分辨率CCD摄像头:2.0 MP像素分辨率;具备SD-card插槽,SD卡-存储容量:≥16G, 有自身配套的图像处理软件
7)配套磁力吸附针座:4个;X/Y/Z轴移动范围≥12.5mm×12.5mm×12.5mm,移动分辨率:100TPI
8)配套4根集成化的探针臂和三轴电缆:电缆长度:≥1.5米
9)配置支持手动探针机台的双开门屏蔽暗箱、防震台
10)配套相应的真空泵和压空泵
1) System composition: manual probe station host, image microscopy device, probe holder, probe, connecting wire, etc.
2) Sample slide table: slide table size: 6 inches; X/Y axis travel: ≥150*150mm; three axes, can absorb samples in different regions, and have independent vacuum control switches for each region; the slide table can be pulled horizontally Moving out: ≥90mm, easy to place and take out the tested sample;
3) There are two Chuck sub-tables with vacuum adsorption capacity, which support the expansion of the function of the RF project in the future: used for RF calibration and contact adjustment;
4) With high stability of the microscope bridge, XY can move up to 50mm*50mm
5) The maximum magnification of the microscope: up to 400 times; equipped with a total of three objective lenses 2X, 10X, and 20X
6) Equipped with high-resolution CCD camera: 2.0 MP pixel resolution; with SD-card slot, SD card-storage capacity: ≥16G, with its own supporting image processing software
7) Matching magnetic adsorption needle seat: 4; X/Y/Z axis moving range ≥12.5mm×12.5mm×12.5mm, moving resolution: 100TPI
8) Supporting 4 integrated probe arms and triaxial cables: cable length: ≥ 1.5 meters
9) Equipped with double-door shielding dark box and anti-vibration platform that support manual probe machine
10) Matching the corresponding vacuum pump and air pressure pump
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"1)样品载片台可分区吸附样品,并具备各分区独立真空控制开关;载片台可被水平拉出移动:≥90mm,便于放置和取出被测样品;
2)具有两个带真空吸附能力的子承片台Chuck,支持今后扩展研发射频项目的功能:用于射频校准与接触调整;
3)RF,毫米波和次THz表征,FA,DWC,MEMS,光电测试和WL等各种应用的理想选择,随着需求的增长可重新配置和升级;
4) 内置的隔振解决方案可实现减振效果。
1) Sample slide table can absorb samples in different regions, and have independent vacuum control switches for each region; the slide table can be pulled horizontally Moving out: ≥90mm, easy to place and take out the tested sample;
2)There are two Chuck sub-tables with vacuum adsorption capacity, which support the expansion of the function of the RF project in the future: used for RF calibration and contact adjustment;
3)Ideal for RF, millimeter-wave and sub-THz characterization, FA, DWC, MEMS, photoelectric testing and WL applications, reconfigurable and upgradable as demand grows;
4)The built-in vibration isolation solution can reduce the vibration effect.
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