大型仪器共享管理系统

"1.微力学测试模块 1.1 三轴纳米定位平台：用于大位移情况下的机械性能测试（移动距离29mm）以及微力传感探针和样品的精准对齐。XYZ三轴方向上均配有位移记录器，可实现微结构自动化测试以及机械性能和形貌的三维扫描。*1.1.1 可移动轴数量：3轴 1.1.2 驱动原理：压电粘滑 *1.1.3 驱动范围：29mm×29mm×29mm
*1.1.4 最小步进：20nm 1.1.5 位移记录器分辨率：1nm（10Hz） *1.1.6 最高速度：10 mm/s 1.1.7 测试频率：最高50Hz
1. 2 三轴压电扫描器：用于小量程内高分辨连续机械性能测试，其位移范围为50µm，分辨率为0.1nm。采用轻敲模式可在50µm×50µm的区域内对样品机械性能和形貌进行扫描。 *1.2.1 可移动轴数量：3轴 1.2.2 驱动原理：压电扫描 *1.2.3 驱动范围：50µm×50µm×50µm *1.2.4 最小步进：0.1 nm *1.2.5 位移记录器分辨率：0.1 nm （10Hz） 1.2.6 测试频率：最高96Hz
1.3 两轴样品定位台：用于显微镜视野范围内样品定位。 1.3.1可移动轴数量：2轴 1.3.2 驱动原理：步进电机 *1.3.3 驱动范围：20mm×20mm 1.3.4 样品安装：2个夹具
1.4带有光学栅反馈系统，可准确记录位移量
1.5 微力传感探针（按需额外购买） *1.5.1 最大测力范围：±200mN（FT-S200’000微力传感探针） *1.5.2 最小力学分辨率：0.5nN (10Hz) （FT-S200微力传感探针） 1.5.3 测试频率：最高96kHz 1.5.4 可定制探针尖端：钨针尖，圆角半径<5μm，<2μm，<0.1μm；金刚石尖端，三棱锥，圆锥（半径=2μm）玻璃球尖端，半径=25±1μm 红宝石球尖端，半径=125±1.3μm
1.6 微镊（按需额外购买） *1.6.1 开口范围：0-100 μm 1.6.2 驱动电压：0-200 V *1.6.3 力感应：自带力感应，分辨率为50nN@10Hz
2.显微镜模块对微小样品进行力学测试或微操作要求工作距离大的高分辨率显微镜，从而保证微力传感探针或微镊工作的同时清晰观测样品。
*2.1 光学变焦范围：1:7电动 2.2 可调节观察视野：从 9.5×7.1mm 至1.4×1.0mm 2.3 手动光圈调节景深 *2.4工作距离：95 mm *2.5相机：300万像素CMOS传感器 2.6变焦距离（粗调）：30 mm，电动 *2.7 显微镜倾斜角：-90°-0°（垂直）-+90° *2.8 照明：同轴透镜光源、环形光源、背光（低角度）、背光（高角度），均为LED可调光源
3.软件 3.1 包含机械性能测试软件、Labview可模块化编程软件 3.2 可以自动进行：压缩力、拉伸力、剪切力、尺寸/形貌、形变范围、粘合力、驱动力检测，纳米压痕、失效断裂、蠕变和循环测试等 3.3 可以同时得到位移量和力学量，实现力-位移-时间的自动测量 *3.4 具备力学传感器保护模式，测试过程也具有力学传感器过载保护机制 *3.5 可以控制三维移动装置进行精准移动，微力传感探针和微镊的高精度定位，微镊子夹持力反馈和闭环控制 3.6 可以导出数据，保存为.txt或者.xls格式 *3.7 整个测试过程可视化，可以实时观测测样过程。 *3.8能够实现自动化单个位置或多个位置的重复测量，这一功能可以实现循环测试或针对感兴趣区域进行阵列测试。 3.9 用户自定义测试软件库，构建用户自定义测试流程的教程文件
4.温度控制台室温可将样品加热到200℃ 高温模块可加热样品。结合FemtoTools尖端加热传感器，可以在各种温度下对样品进行等温线纳米力学测试。它不仅可以测量材料特性随温度的变化，而且可以定量研究热诱导的塑性变形和断裂机理的纳米尺度变化。外形尺寸（长×宽×高）：440×390×460 mm 5. 接口：USB 6. 电源：12V（110V/230V）
1. Micromechanics test module 1.1 3- axis nano positioning platform: used for mechanical performance test under large displacement (moving distance 29mm) and precise alignment of micro force sensing probe and sample. The displacement recorder is equipped in the 3-axis direction of XYZ, which can realize the automatic test of microstructure and three-dimensional scanning of mechanical properties and morphology* 1.1.1 number of movable axes: 3 axis 1.1.2 driving principle: piezoelectric stick slip * 1.1.3 driving range: 29mm × 29mm × 29mm
*1.1.4 minimum step: 20nm 1.1.5 resolution of displacement recorder: 1nm (10Hz) * 1.1.6 maximum speed: 10 mm / s 1.1.7 test frequency: 50 Hz
1.2 triaxial piezoelectric scanner: used for high resolution continuous mechanical property test in small range, with displacement range of 50 µ m. The resolution is 0.1nm. The mechanical properties and morphology of the samples can be scanned in the region of 50 µ m × 50 µ m by tapping mode Tap mode can be used in 50 µ m × 50 µ m * 1.2.1 number of movable axes: 3 axis 1.2.2 driving principle: piezoelectric scanning * 1.2.3 driving range: 50µm×50µm×50µm * 1.2.4 minimum step: 0.1 nm * 1.2.5 displacement recorder resolution: 0.1 nm (10Hz) 1.2.6 test frequency: maximum 96hz
1.3 two axis sample positioning table: used for sample positioning within the field of vision of microscope. 1.3.1 number of movable axes: 2 axis 1.3.2 driving principle: stepping motor * 1.3.3 driving range: 20mm × 20mm 1.3.4 sample installation: 2 clamps
1.4 with optical grating feedback system, the displacement can be accurately recorded
1.5 micro force sensing probe (additional purchase on demand) * 1.5.1 maximum force range: ± 200mN (ft-s200'000 micro force sensing probe) * 1.5.2 minimum mechanical resolution: 0.5nn (10Hz) (ft-s200 micro force sensing probe) 1.5.3 test frequency: maximum 96KHz 1.5.4 customizable probe tip: tungsten tip, fillet radius < 5 μ m，<2 μ m，<0.1 μ m； Diamond tip, triangular pyramid, cone (radius = 2 μ m) Glass ball tip, radius = 25 ± 1 μ M ruby ball tip, radius = 125 ±1.3 μ m
1.6 Micro tweezers (additional purchase on demand) * 1.6.1 opening range: 0-100 μ M 1.6.2 driving voltage: 0-200 V * 1.6.3 force sensing: with force sensing, resolution of 50nN@10Hz
2. The microscope module performs mechanical test or micromanipulation on micro samples, which requires a high-resolution microscope with large working distance, so as to ensure that the samples can be observed clearly while the micro force sensing probe or tweezers are working.
*2.1 optical zoom range: 1:7 electric 2.2 adjustable viewing field: from 9.5 × 1 mm to 1.4 × 1.0 mm 2.3 manual aperture adjustment depth of field * 2.4 working distance: 95 mm * 2.5 camera: 3 megapixel CMOS sensor 2.6 zoom distance (coarse adjustment): 30 mm, electric * 2.7 microscope tilt angle: - 90 °- 0 °（ Vertical) - + 90 ° * 2.8 lighting: coaxial lens light source, ring light source, backlight (low angle) and backlight (high angle) are all led adjustable light sources
3. Software 3.1 includes mechanical property test software and LabVIEW modular programming software. 3.2 can automatically detect compression force, tensile force, shear force, size / morphology, deformation range, adhesion force, driving force, nano indentation, failure fracture, creep and cycle test. 3.3 displacement and mechanical quantity can be obtained at the same time, Automatic measurement of force displacement time * 3.4 with mechanical sensor protection mode and overload protection mechanism of mechanical sensor in the test process * 3.5 can control 3D mobile device to move accurately, micro force sensor probe and micro tweezers can be positioned with high precision, micro tweezers clamping force feedback and closed-loop control 3.6 can export data, Saved as. TXT or. XLS format * 3.7, the whole test process can be visualized, and the test process can be observed in real time* 3.8 it can realize automatic repeated measurement of single position or multiple positions. This function can realize cyclic test or array test for regions of interest. 3.9 user defined test software library, build user-defined test process tutorial file
4. The temperature console can heat the sample to 200 ℃ at room temperature, and the high temperature module can heat the sample. Combined with the femtotools tip heating sensor,The samples can be tested by isotherm nanomechanics at various temperatures. It can not only measure the change of material properties with temperature, but also quantitatively study the nanoscale change of heat induced plastic deformation and fracture mechanism. Overall dimension (L) × wide × (high): 440 × three hundred and ninety × 460 mm 5. Interface: USB 6. Power supply: 12V (110V / 230V)"

"FT-MTA03微力学测试与组装系统是一款用途广泛的精密测试系统,其不仅能精确定量测试微纳米尺度样品的机械性能,而且能测量微纳结构的尺寸/几
何形貌。FT-MTA03集纳米压痕仪、微拉伸仪、轮廓仪和多功能微结构分析仪的众多功能于一体。其测力范围为±200mN,力学分辨率达0.5nN(9个数量
级),XYZ三轴位移测量范围从0.1nm至29mm(8个数量级)。FT-MTA03多样灵活的测试模式能满足用户各种不同的应用和要求,为微观结构分析提供了一套全面完整的解决方案。The FT-MTA03 micromechanical test and assembly system is a versatile precision test system that not only accurately quantifies the mechanical properties of micro- and nano-scale samples, but also measures the size/geometry of micro and nano structures. The FT-MTA03 provides a comprehensive solution for microstructure analysis, with a force range of ±200 mN, mechanical resolution of 0.5 nN (9 orders of magnitude), and a three-axis displacement range of 0.1 nm to 29 mm (8 orders of magnitude).”

主要规格及技术指标

主要功能及特色

主要附件及配置