大型仪器共享管理系统

"显微角分辨光谱模块ARMS（中文）
测量模式：
（1）全角度入射反射模式；
（2）全角度入射透射模式；
（3）定角度入射反射模式；
（4）定角度入射透射模式。

角度测试范围：
（1）反射入射角度范围：-60~60°（可见波段），-50~50°（近红外波段）
（2）透射入射角度范围：-50~50°（可见波段），-50~50°（近红外波段）
（3）接收角度范围：-60~60°（可见波段），-50~50°（近红外波段）
角度分辨率：
（1）可见定角度入射分辨率：4°；
（2）近红外定角度入射分辨率：6°；
（3）可见接收角度分辨率：≦ 1°；
（4）近红外接收角度分辨率：≦ 1°。
测量光谱波段：400~1650nm
物镜配置：20X、50X、100X（NA0.9，可见），100X近红外（NA0.85，近红外）
最小光斑：≦15μm ×15μm
探测器：制冷型面阵背照式（可见），InGaAs面阵探测器（近红外）
光谱仪焦距：300mm

Angle-Resolved Micro-Spectrometer (ARMS English)
Measurement module:
(1) FAR: Full-angle incident reflection mode;
(2) FAT：Full-angle incident transmission mode;
(3) CAR：Certain-angle incident reflection mode;
(4) CAT：Certain-angle incidence transmission mode.
Angle test range:
(1) Reflection incidence angle range: -60~60° (VIS), -50~50° (NIR);
(2) Transmission incidence angle range: -50~50° (VIS), -50~50° (NIR) ;
(3) Receiving Angle range: - 60 ~ 60 ° (visible light), and 50 ~ 50 ° (near infrared)
Resolution:
(1) Certain-angle incident resolution: 4 °(VIS);
(2) Certain-angle incident resolution: 6°;
(3) Receiving angle resolution: ≦1 °(VIS);
(4) Receiving angle resolution: ≦1 °(NIR).
Spectral range: 400~1650nm;
Objective configuration: 20, 50, 100x (NA0.9, VIS), 100x (NA0.9, NIR)
Minimum spot size: ≦15μm ×15μm
Detector: Cooled array backlit (VIS) InGaAs array detector (NIR) ;
Focal length of spectrometer: 300mm.

超透镜检测模块：
（1）测量波段：380~1000nm
（2）光路基本架构：透反射光路
（3）数值孔径：≥0.7
（4）适配样品最小尺寸：100μm
（5）焦距测量范围：0-5mm
（6）Z轴步进精度：3μm
（7）空间分辨率：2μm
（8）成像相机：1900万像素16位可见成像相机
（9）软件：可实现样品的焦距、光场分布、点扩散函数PSF、调制传递函数MTF、数值孔径的检测。

Metalens Detection Module:
(1) Wavelength Range: 380~1000nm
(2) Optical Path Configuration: Transmit-Reflect Optical Path
(3) Numerical Aperture: ≥0.7
(4) Minimum Sample Size Compatibility: 100μm
(5) Focal Length Measurement Range: 0-5mm
(6) Z-Axis Stepping Precision: 3μm
(7) Spatial Resolution: 2μm
(8) Imaging Camera: 19-Megapixel 16-bit Visible Imaging Camera
(9) Software: Capable of measuring sample focal length, light field distribution, Point Spread Function (PSF), Modulation Transfer Function (MTF), and numerical aperture.
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"显微角分辨光谱模块：
（1）微米量级样品信号采集：基于显微成像系统架构，具有微米（~10 μm）尺度的空间分辨能力，同时配置可覆盖10~180 μm的尺寸调节范围的空间选区光阑，支持检测区域的大小缩放、平移、旋转等五维调节。
（2）毫秒级瞬态光谱采集能力：采用FT-ARS角分辨光谱技术配合成像CCD，对角分辨光谱进行拍摄式高光谱采集，采集时间可以压缩到毫秒级（~ms）。
（3）光路系统全自动切换ARMS的光机系统采用全电动切换模块，既支持全角度、定角度、透射、反射等测量模式自动切换，又支持Vis和Nir波段双通道自动切换。

(1) Micrometer scale sample signal acquisition: Based on the microscopic imaging system architecture, it has micron (~10 μm) scale spatial resolution ability, and is equipped with a spatial selection diaphragm that can cover the size adjustment range of 10~180 μm, supporting five-dimensional adjustment of the size of the detection area, such as scaling, translation and rotation. (2) Millisecond transient spectrum acquisition capability: Using FT-ARS angular resolution spectroscopy technology with imaging CCD, hyperspectral acquisition of angular resolution spectrum can be performed by shooting, and the acquisition time can be compressed to millisecond level (~ms).
(3) Automatic switching of optical path system, the opto-mechanical system of ARMS adopts all-electric switching module, which not only supports automatic switching of measurement modes such as full Angle, fixed Angle, transmission and reflection, but also supports dual channel automatic switching of Vis and Nir band.

超透镜检测模块：
（1）微米级采样区域：基于Olympus 显微平台，配合消色差和消像差的准直及成像光路，实现了 μm 量级超构表面器件的光场检测；
（2）反射+透射模式：支持透射和反射两种模式，能够轻松实现 0~22 mm 行程的光场分布测量；
（3）宽波段/多光源：支持380~1000 nm的宽谱段数据采集；支持空间光输入和光纤输入，可同时外接多台激光光源；
（4）智能化软件操作与分析：可视化软件拥有直观的图形化操作界面，用户可以轻松上手，充分利用软件功能。只需要简单的操作，即可获取三维光场分布、焦距、点扩散函数（PSF）和调制传输函数（MTF）等关键指标。

Metalens Detection Module:
(1) Micron-Level Sampling Area: Utilizing the Olympus microscopy platform, combined with achromatic and aplanatic optical paths, this module achieves optical field detection for metasurface devices.
(2) Reflectance + Transmittance Modes: supports both transmittance and reflectance modes, enabling effortless measurement of optical field distributions over a range of 0 to 22 mm.
(3) Broadband/Multi-Light Source: Supports data collection in a wide spectral range from 380 to 1000 nm. It accommodates spatial light input and fiber input, allowing for the simultaneous connection of multiple laser light sources.
(4) Intelligent Software Operation and Analysis: The visual software boasts an intuitive graphical user interface, making it easy for users to take full advantage of its capabilities. With simple operations, users can obtain key metrics such as three-dimensional light field distributions, focal lengths, Point Spread Functions (PSF), and Modulation Transfer Functions (MTF).
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